产品介绍:蓝宝石晶片是由高纯度氧化铝(Al2 O3)制成的六方结构单晶材料,具耐腐蚀、耐高温高压、低介电损耗、热稳定性好等优点,是发光二极管和激光二极管的理想材料。
用途:PSS衬底、外延衬底
蓝宝石晶片/Sapphire Wafer |
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项目/Item | 2英寸/2 Inch | 4英寸/4 Inch | 6英寸/6 Inch |
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晶体/Crystal | LED Grade Sapphire | LED Grade Sapphire | LED Grade Sapphire |
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蓝宝石纯度/ | ≥99.998% | ≥99.998% | ≥99.998% |
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Sapphire purity |
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颜色/Color | 无色透明/ | 无色透明/ | 无色透明/ |
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Transparent | Transparent | Transparent |
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方向/Orientation | C面偏M轴0.20°±0.1°角度/ | C偏M轴0.20°±0.1°角度/ | C偏M轴0.20°±0.1°角度/ |
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C plane tiled M axis 0.20°±0.1° | C plane tiled M axis 0.20°±0.1° | C plane tiled M axis 0.20°±0.1° |
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直径/Diameter | 50.8±0.1mm | 100±0.2mm | 150±0.2mm |
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厚度/Thickness | 430±15μm | 650±25μm | 1300±25μm |
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定位面方向/Primary Flat Location | A-axis ± 0.2° | A-axis ± 0.2° | A-axis ± 0.2° |
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定位面长度/Flat Length | 16.0±1.0 mm | 30.0 ±1.0 mm | 49.0±1.0 mm |
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抛光面Front Side Surface | Mirror polished , EPI-Ready | Mirror polished , EPI-Ready | Mirror polished , EPI-Ready |
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表面粗超度/Surface Roughness | Ra < 3Å | Ra < 3Å | Ra < 3Å |
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背面粗超度/Back Side Roughness | Fine ground, Ra=1.0±0.2um | Fine ground, Ra=1.0±0.2um | Fine ground, Ra=1.0±0.2um |
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平坦度/TTV | ≤ 5.0μm | ≤ 10μm | ≤ 15μm |
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中心弯曲度/BOW | 0~-5um | 0~-10um | 0~-30um |
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整体弯曲度/Warp | ≤ 10.0μm | ≤15μm | ≤ 40μm |
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气泡和颜色/Bubble & Color | None by visual inspection in intensive light | None by visual inspection in intensive light | None by visual inspection in intensive light |
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表面边界/Ground Boundary | None by visual inspection in fluorescent light | None by visual inspection in fluorescent light | None by visual inspection in fluorescent light |
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清洁度/Cleanliness | Free visible contamination | Free visible contamination | Free visible contamination |
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包装/Packaging | Vacuum packed in one-piece box or Entegris cassettes of 25 | Vacuum packed in one-piece box or Entegris cassettes of 25 | Vacuum packed in one-piece box or Entegris cassettes of 25 |
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in a class 100 clean room, under a nitrogen atmosphere | in a class 100 clean room, under a nitrogen atmosphere | in a class 100 clean room, under a nitrogen atmosphere |
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