产品介绍：蓝宝石晶片是由高纯度氧化铝（Al2 O3）制成的六方结构单晶材料，具耐腐蚀、耐高温高压、低介电损耗、热稳定性好等优点，是发光二极管和激光二极管的理想材料。
用途：PSS衬底、外延衬底
| 蓝宝石晶片/Sapphire Wafer |
| |||
| 项目/Item | 2英寸/2 Inch | 4英寸/4 Inch | 6英寸/6 Inch |
|
| 晶体/Crystal | LED Grade Sapphire | LED Grade Sapphire | LED Grade Sapphire |
|
| 蓝宝石纯度/ | ≥99.998% | ≥99.998% | ≥99.998% |
|
| Sapphire purity |
| |||
| 颜色/Color | 无色透明/ | 无色透明/ | 无色透明/ |
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| Transparent | Transparent | Transparent |
| |
| 方向/Orientation | C面偏M轴0.20°±0.1°角度/ | C偏M轴0.20°±0.1°角度/ | C偏M轴0.20°±0.1°角度/ |
|
| C plane tiled M axis 0.20°±0.1° | C plane tiled M axis 0.20°±0.1° | C plane tiled M axis 0.20°±0.1° |
| |
| 直径/Diameter | 50.8±0.1mm | 100±0.2mm | 150±0.2mm |
|
| 厚度/Thickness | 430±15μm | 650±25μm | 1300±25μm |
|
| 定位面方向/Primary Flat Location | A-axis ± 0.2° | A-axis ± 0.2° | A-axis ± 0.2° |
|
| 定位面长度/Flat Length | 16.0±1.0 mm | 30.0 ±1.0 mm | 49.0±1.0 mm |
|
| 抛光面Front Side Surface | Mirror polished , EPI-Ready | Mirror polished , EPI-Ready | Mirror polished , EPI-Ready |
|
|
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| 表面粗超度/Surface Roughness | Ra < 3Å | Ra < 3Å | Ra < 3Å |
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| 背面粗超度/Back Side Roughness | Fine ground, Ra=1.0±0.2um | Fine ground, Ra=1.0±0.2um | Fine ground, Ra=1.0±0.2um |
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| 平坦度/TTV | ≤ 5.0μm | ≤ 10μm | ≤ 15μm |
|
| 中心弯曲度/BOW | 0～-5um | 0～-10um | 0～-30um |
|
| 整体弯曲度/Warp | ≤ 10.0μm | ≤15μm | ≤ 40μm |
|
| 气泡和颜色/Bubble & Color | None by visual inspection in intensive light | None by visual inspection in intensive light | None by visual inspection in intensive light |
|
| 表面边界/Ground Boundary | None by visual inspection in fluorescent light | None by visual inspection in fluorescent light | None by visual inspection in fluorescent light |
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| 清洁度/Cleanliness | Free visible contamination | Free visible contamination | Free visible contamination |
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| 包装/Packaging | Vacuum packed in one-piece box or Entegris cassettes of 25 | Vacuum packed in one-piece box or Entegris cassettes of 25 | Vacuum packed in one-piece box or Entegris cassettes of 25 |
|
| in a class 100 clean room, under a nitrogen atmosphere | in a class 100 clean room, under a nitrogen atmosphere | in a class 100 clean room, under a nitrogen atmosphere |
| |
产品介绍：蓝宝石晶片是由高纯度氧化铝（Al2 O3）制成的六方结构单晶材料，具耐腐蚀、耐高温高压、低介电损耗、热稳定性好等优点，是发光二极管和激光二极管的理想材料。
用途：PSS衬底、外延衬底
| 蓝宝石晶片/Sapphire Wafer |
| |||
| 项目/Item | 2英寸/2 Inch | 4英寸/4 Inch | 6英寸/6 Inch |
|
| 晶体/Crystal | LED Grade Sapphire | LED Grade Sapphire | LED Grade Sapphire |
|
| 蓝宝石纯度/ | ≥99.998% | ≥99.998% | ≥99.998% |
|
| Sapphire purity |
| |||
| 颜色/Color | 无色透明/ | 无色透明/ | 无色透明/ |
|
| Transparent | Transparent | Transparent |
| |
| 方向/Orientation | C面偏M轴0.20°±0.1°角度/ | C偏M轴0.20°±0.1°角度/ | C偏M轴0.20°±0.1°角度/ |
|
| C plane tiled M axis 0.20°±0.1° | C plane tiled M axis 0.20°±0.1° | C plane tiled M axis 0.20°±0.1° |
| |
| 直径/Diameter | 50.8±0.1mm | 100±0.2mm | 150±0.2mm |
|
| 厚度/Thickness | 430±15μm | 650±25μm | 1300±25μm |
|
| 定位面方向/Primary Flat Location | A-axis ± 0.2° | A-axis ± 0.2° | A-axis ± 0.2° |
|
| 定位面长度/Flat Length | 16.0±1.0 mm | 30.0 ±1.0 mm | 49.0±1.0 mm |
|
| 抛光面Front Side Surface | Mirror polished , EPI-Ready | Mirror polished , EPI-Ready | Mirror polished , EPI-Ready |
|
|
| ||||
| 表面粗超度/Surface Roughness | Ra < 3Å | Ra < 3Å | Ra < 3Å |
|
| 背面粗超度/Back Side Roughness | Fine ground, Ra=1.0±0.2um | Fine ground, Ra=1.0±0.2um | Fine ground, Ra=1.0±0.2um |
|
| 平坦度/TTV | ≤ 5.0μm | ≤ 10μm | ≤ 15μm |
|
| 中心弯曲度/BOW | 0～-5um | 0～-10um | 0～-30um |
|
| 整体弯曲度/Warp | ≤ 10.0μm | ≤15μm | ≤ 40μm |
|
| 气泡和颜色/Bubble & Color | None by visual inspection in intensive light | None by visual inspection in intensive light | None by visual inspection in intensive light |
|
| 表面边界/Ground Boundary | None by visual inspection in fluorescent light | None by visual inspection in fluorescent light | None by visual inspection in fluorescent light |
|
| 清洁度/Cleanliness | Free visible contamination | Free visible contamination | Free visible contamination |
|
| 包装/Packaging | Vacuum packed in one-piece box or Entegris cassettes of 25 | Vacuum packed in one-piece box or Entegris cassettes of 25 | Vacuum packed in one-piece box or Entegris cassettes of 25 |
|
| in a class 100 clean room, under a nitrogen atmosphere | in a class 100 clean room, under a nitrogen atmosphere | in a class 100 clean room, under a nitrogen atmosphere |
| |
